• 专利附录
  • 专利说明
  • 权利要求
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    • 专利摘要:
    PURPOSE: To provide a surface acoustic wave device, and a communication unit comprising it, in which the balance between balance signal terminals 11 and 12 is enhanced by a balance-unbalance converting function. CONSTITUTION: A substrate 30, provided with a surface acoustic element having a balance-unbalance converting function, is provided at the bottom plate part 32 of a container 31 comprising a plurality of layers. An electrical wiring part is provided between the upper layer 35 and the lower layer 36 of the bottom plate part 32, such that a delay line, reactance component or a resistive component is added to at least one of the balance signal terminals 11 and 12. External terminals 52 and 53 of balance signal for externally connecting the surface acoustic element are provided symmetric with respect to the center of the container 31.
    公开号:KR20020072230A
    申请号:KR1020020012411
    申请日:2002-03-08
    公开日:2002-09-14
    发明作者:와타나베히로키
    申请人:가부시키가이샤 무라타 세이사쿠쇼；
    IPC主号:
    专利说明:

    Surface acoustic wave apparatus and communication apparatus
    [29] The present invention relates to surface acoustic wave (SAW) equipment having balanced signal terminals formed at least on the input side and output side and, in particular, to SAW equipment having a balanced unbalance conversion function, and also to communication equipment comprising the above-described SAW equipment.
    [30] Significant technological advances have been made in reducing the size and weight of communications equipment such as mobile phones. This advance has been achieved by reducing the number and size of individual components of mobile phones. As the frequency used in mobile phones increases, for example, to the GHz band, SAW equipment is important because it can reduce the sizes of the individual elements of the SAW.
    [31] Some SAW equipments require impedance matching devices, such as phase shifters, at the input / output terminals. Reference Citation 1 (Japanese Unexamined Patent Publication No. 8-195645: Device mounting package) describes the following types of SAW equipment. The impedance matching device is formed on the matching circuit board, and the matching circuit board is bonded to the SAW device mounting board. This arrangement simplifies the resulting package.
    [32] Reference Citation 2 (Japanese Unexamined Patent Publication No. 6--97761: Branching Filter and Method Therefor) describes the following types of SAW equipment. In the branching circuit, the impedance matching device and the phase matching device are placed in a different package part than the part in which the SAW filter device is accommodated. In this arrangement, the size of the SAW equipment is reduced, while the insulation of the filter device is maintained.
    [33] In order to reduce the number of parts, studies have been actively carried out on SAW equipment provided with an equilibrium unbalance conversion function, a so-called "balun function". These SAW equipments are most widely used in GSM (Global System for Mobile communications) mobile phones that are used around the world, especially in Europe.
    [34] The balun is a circuit for matching balanced and unbalanced lines. More particularly, when a balanced line, such as a twin-lead type feeder, and an unbalanced signal, such as a coaxial cable, are directly connected, the balanced current flows in a way that causes the feeder itself to act as an antenna. Thus, the balun circuit is formed to prevent the generation of a balanced current, thereby matching the balanced line and the unbalanced line.
    [35] Two to three patent applications relating to SAW equipment provided with the balun function described above have been submitted. SAW devices used in SAW devices are provided with SAW devices provided with a balun function substantially equal in input impedance and output impedance, and the SAW devices are usually used.
    [36] In the SAW apparatus shown in FIG. 18, on the piezoelectric substrate 100, one comb-shaped electrode 101 (also referred to as an "interdigital electrode", hereafter referred to as "IDT") is equilibrated. Formed as a part. IDTs 102 and 103 are formed on the left and right sides (in the SAW propagation direction) of IDT 101 as unbalanced portions, respectively. Reflectors 104 and 105 are arranged between the IDTs 101, 102 and 103 that reflect the SAW propagated at the surface to improve transmission efficiency. SAW equipment with three IDTs arranged along the SAW propagation direction is referred to as "3 IDT type extended coupled resonance mode SAW apparatus".
    [37] In the SAW apparatus described above, the reflectors 107 and 108 are arranged so that the IDT 106 lies between them to define the SAW resonator. The SAW resonator is connected in series with the IDTs 102 and 103. Thus, balanced signal terminals 109 and 110 connected to the IDT 101 and unbalanced signal terminals 111 connected to the IDT 106 are also formed.
    [38] In the SAW equipment provided with the balun function described above, the same amplitude characteristics and 180 ° phase reversal characteristics are required as the transmission characteristics in the pass band between the unbalanced signal terminals 111 and the respective balanced signal terminals 109 and 110. The above-described amplitude characteristics and phase characteristics are referred to as "amplitude balance" and "phase balance", respectively.
    [39] Amplitude balance and phase balance are defined as follows. When the SAW device having the balun function described above is used as a three-port device, and when the unbalanced input terminal is the first port, the balanced output terminals are the second port, and the third port, the amplitude balance | A | is A = | Is defined as 20log (S21) |-| (20log (S31) |, and B is | S21-∠S31 |, the phase balance is | B-180 |, where S21 is the second at the first port. To the port, S31 is a coefficient of movement from the first port to the third port, and the sign |
    [40] Ideally, in the pass band of SAW equipment, amplitude balance is 0dB and phase balance is 0. As an example of SAW equipment having a balloon function, the SAW device shown in FIG. 18 is mounted in the package 200 shown in FIGS. 20 and 21.
    [41] As shown in Fig. 19, in the rear surface (outer surface), an unbalanced signal terminal, external terminal 201, and balanced signal terminals, external terminals 202 and 203 are arranged along the periphery of the rear surface.
    [42] As shown in FIG. 20, within the package 200, a die attaching portion 204 is formed to hold the SAW device shown in FIG. 18 and to electrically connect the SAW device to external devices. In the wiring patterns of the die attaching portion 204, the external terminal 201 and the wiring pattern 302 disposed adjacent to each other are connected, and the external terminal 202 and the wiring pattern 303 disposed adjacent to each other are connected to each other. And the external terminal 203 and the wiring pattern 304 which are arrange | positioned adjacent to each other are connected.
    [43] In conventional SAW equipment, however, the following problems exist.
    [44] In the package 200 shown in FIG. 19, the balanced signal outer terminals 202 and 203 are disposed symmetrically with respect to the unbalanced signal outer terminal 201. Thus, the balance between the balanced signal external terminals 202 and 203 is reduced.
    [45] The reason for this is as follows. Due to the arrangement of the external terminals 201, 202 and 203 on the rear of the package 200, the distance from the unbalanced signal external terminal 201 to the balanced signal external terminal 202 is equal to the unbalanced signal external terminal 201 and the balanced signal external. It is different from the distance to the terminal 203. Thus, the bridge capacitance generated between the unbalanced signal outer terminal 201 and the balanced signal outer terminal 202 is different from the bridge capacitance between the unbalanced signal outer terminal 201 and the balanced signal outer terminal 203.
    [46] In the wiring patterns on the die attach portion 204 of the package 200, electrodes which are symmetrical with respect to the individual parts cannot be provided and therefore the balance characteristic is reduced.
    [47] In addition, in the SAW device shown in FIG. 18, the electrical polarity between the IDT 102 and the adjacent electrode fingers of the IDT 101 is determined by the electrical polarity of the adjacent electrode fingers between the IDT 103 and the IDT 101. It is different from polarity. Thus, the balance of the SAW device itself is not sufficient and therefore the balance of the SAW equipment is not sufficient.
    [48] In order to solve these problems, the following SAW equipments have been considered. As shown in FIG. 21, the wiring patterns are arranged in the wiring attachment portion of the package 200 such that the balanced signal terminals 502 and 503 are symmetrically disposed with respect to the balanced signal terminal 501 as shown in FIG. 22. 204 is arranged by strip lines 402. In another structure, an inductive component defined by the strip lines 402 is formed, thereby improving the balance of the SAW device.
    [49] In the structures described above, however, when the strip lines 402 are formed in the die attaching portion 204, the area forming the bonding bumps in the die attaching portion 204 is reduced.
    [50] Thus, due to the reduced bumps forming the area in the SAW device, the flexibility of the layout in the SAW device is reduced. For example, the number of connection portions between the ground pattern of the die attach portion 204 and the package 200 is reduced, thereby weakening the ground force. This adversely affects the electrical characteristics of the SAW device. In addition, due to the limited number of bumps, the bonding strength is also reduced.
    [1] 1 is a cross-sectional view schematically illustrating SAW equipment according to a first preferred embodiment of the present invention;
    [2] FIG. 2 is a schematic diagram illustrating a SAW apparatus used for the SAW equipment shown in FIG. 1;
    [3] 3 is a schematic diagram illustrating the layout of longitudinally coupled resonator mode SAW components, SAW resonator balanced signal terminals and unbalanced signal terminals on a substrate used in the SAW device shown in FIG. 1;
    [4] 4 is a schematic diagram illustrating the layout of the die attach portion within the package of the SAW equipment shown in FIG. 1;
    [5] 5 is a plan view schematically illustrating an underlayer of the bottom portion of the package shown in FIG. 4;
    [6] 6 is a plan view schematically illustrating the back side of the package shown in FIG. 4;
    [7] 7 is a graph illustrating the difference in amplitude balance between the SAW equipment and the conventional SAW equipment shown in FIG. 1;
    [8] 8 is a graph illustrating the difference in phase balance between the SAW equipment shown in FIG. 1 and the conventional SAW equipment;
    [9] 9 is a graph illustrating a difference in insertion loss frequency characteristic between the SAW equipment and the conventional SAW equipment shown in FIG. 1;
    [10] 10 is a schematic diagram showing an example of a modification made to the SAW apparatus shown in FIG. 2 provided with an electrical neutral point and a balun function;
    [11] FIG. 11 is a schematic diagram showing another example of a modification made to the SAW apparatus shown in FIG. 2 provided with an electrical neutral point and a balun function; FIG.
    [12] 12 is a schematic diagram illustrating another example showing another example of a modification made to the SAW apparatus shown in FIG. 2;
    [13] 13 is a plan view schematically illustrating a die attach portion in a package of a SAW device according to a second preferred embodiment of the present invention;
    [14] 14 is a plan view schematically showing an underlayer of the bottom portion of the package shown in FIG. 13;
    [15] FIG. 15 is a graph illustrating the difference in amplitude balance between the SAW equipment of the second preferred embodiment and the conventional SAW apparatus; FIG.
    [16] FIG. 16 is a graph for explaining the difference in phase balance between the SAW equipment of the second preferred embodiment and the conventional SAW equipment; FIG.
    [17] FIG. 17 is a block diagram illustrating key parts of communication equipment including SAW equipment of the first or second preferred embodiment of the third preferred embodiment of the present invention; FIG.
    [18] 18 is a schematic diagram illustrating a SAW device used in conventional SAW equipment;
    [19] 19 is a plan view schematically illustrating the back side of a package of a conventional SAW equipment;
    [20] 20 is a plan view schematically illustrating the layout of the die attaching portion to the package shown in FIG. 19;
    [21] 21 is a plan view schematically illustrating another die attaching portion in a package; And
    [22] 22 is a plan view schematically illustrating external terminals connected to the die attaching portion shown in FIG. 21; to be.
    [23] (A brief description of the main parts of the drawing)
    [24] 11 ... balanced signal terminals 12 ... unbalanced signal terminals
    [25] 30 ... piezoelectric substrate 32 ... bottom
    [26] 35 upper layer 36 lower layer
    [27] 43, 44, 45 ... wiring pattern 46, 47 ... via hole
    [28] 52, 53 ... External terminals 61, 63 ... Ground metal sheath pattern
    [51] In order to overcome the above problems, according to a preferred embodiment of the present invention, SAW equipment includes a SAW device formed on a piezoelectric substrate. The SAW apparatus according to the preferred embodiment comprises at least one interdigital electrode and balanced signal terminals formed at least for the input side and the output side. The multilayer holding substrate forms external terminals that connect the balanced signal terminals to the external device. At least one interdigital electrode is formed facing the surface to hold the SAW device. The electrical circuit is arranged between the layers of the multilayer holding substrate to be positioned between the balanced signal terminals and the external terminals to increase the balance between the balanced signal terminals.
    [52] According to the above arrangement, the SAW device includes at least one interdigital electrode and balanced signal terminals for at least the input side and the output side, so that a balun function is formed for the SAW device.
    [53] The holding substrate is a multilayer plate, and the electric circuit is formed between the layers of the holding substrate. Thus, the flexibility of arranging the patterns of connections and electrical circuits in the holding substrate is greatly improved. For example, the bridge capacitance generated between an external terminal connected to an unbalanced signal terminal and an external terminal connected to one of the balanced signal terminals is between an external terminal connected to an unbalanced signal terminal and an external terminal connected to another balanced signal terminal. It is the same as the bridge capacitance generated at, improving the balance between the balanced signals.
    [54] In addition, in the above-described structure, by forming an electrical wiring pattern between the layers of the holding substrate, the connecting portions between the ground wiring pattern in the holding substrate and the ground external terminal are increased so that the grounding force is strengthened. As a result, the attenuation in the frequency range other than the pass band is greatly improved.
    [55] In the SAW equipment described above, the external terminals are preferably substantially symmetrical about the center of the package by using an electrical circuit. Therefore, the electrical characteristics are constant. For example, the bridge capacitance generated between an external terminal connected to an unbalanced signal terminal and an external terminal connected to one of the balanced signal terminals is between an external terminal connected to an unbalanced signal terminal and an external terminal connected to another balanced signal terminal. It is almost equal to the bridge capacitance generated at, whereby the balance between the balanced signals is greatly improved.
    [56] In the above-described SAW equipment, the electrical circuit includes an adjusting portion formed for at least one of the balanced signal terminals of the SAW device in order to improve the signal propagation characteristics of the balanced signal terminal. The adjusting portion is defined by at least one of delay lines, reactance elements and resistance elements or other suitable elements.
    [57] In the SAW equipment described above, the electrical circuit preferably includes adjustment portions for both balanced signal terminals of the SAW device, and one degree of adjustment of the adjustment portion for one of the balanced signal terminals is different for another balanced signal terminal. It is different from the adjustment of the adjustment part.
    [58] In the above arrangement, a reactance element, a delay line or a resistance element is added to one of the balanced signal terminals, or other reactance elements, other delay lines or other resistance elements are added to the balanced signal terminals, thereby making it more reliable. Improve the balances between the balanced signal terminals.
    [59] In the SAW equipment described above, the SAW device comprises a longitudinally coupled resonator mode SAW component having at least three interdigital electrodes. In general, in extended coupled resonator mode SAW components, the electrical environment is different among the balanced signal terminals, and therefore the balance between the balanced signal terminals is substantially deteriorated. However, in the above-described structure, due to the electric circuit, the balances are kept reliably.
    [60] In the SAW equipment described above, the SAW device is assembled such that no electrical neutral point is formed between the balanced signal terminals. In general, in a SAW device formed without electrical neutrality between balanced signals, it is difficult to arrange external terminals symmetrically with respect to the center of the holding substrate, but in the above-described structure, due to the multilayer holding substrate and the electric circuit, the balancing Balances between signal terminals are greatly improved.
    [61] According to another preferred embodiment of the invention, the communication equipment comprises at least one of the SAW equipment according to the preferred embodiment of the invention described above. With this structure, a large number of parts are reduced, thereby forming a composite SAW equipment exhibiting excellent transmission characteristics, thus reducing the size of the overall communication equipment. In addition, the transmission characteristics of the communication equipment are greatly improved.
    [62] Other features, elements, features and advantages of the present invention will become more apparent from the following detailed description of preferred embodiments with reference to the accompanying drawings.
    [63] Preferred Embodiments of the Invention
    [64] Preferred embodiments of the present invention are described in detail below with reference to FIGS.
    [65] SAW equipment according to a first preferred embodiment of the present invention is discussed below with reference to FIGS. In the following description, SAW equipment is described in relation to a DCS receive filter, although other types of SAW equipment are included within the scope of the present invention.
    [66] In the first preferred embodiment, as shown in FIG. 1, the SAW apparatus 29 is disposed on a piezoelectric substrate 30 made of, for example, a 40 ± 5 ° Y-cut X-propagating LiTaO 3 substrate. The SAW device 29 comprises Al electrodes which are preferably formed by photolithography techniques. 2 is a schematic diagram illustrating electrode fingers of a SAW device 29 defining SAW equipment in accordance with a first preferred embodiment of the present invention.
    [67] In the SAW apparatus 29, IDTs 2 and 3 defined on the unbalanced side are disposed in the SAW propagation direction on the left and right sides of the IDT 1 defining the balanced side. The reflectors 4 and 5 are arranged to place the IDTs 2 and 3 therebetween. Therefore, a longitudinally coupled resonator mode SAW component 6 having a balun function and defining the longitudinally coupled resonator mode SAW filter is formed.
    [68] Each of the IDTs 1, 2 and 3 comprises a band-shaped base portion (bus bar) and two electrode portions provided with a plurality of electrode fingers. The electrode fingers extend in a direction substantially perpendicular to the two sides of the base portion to be substantially parallel to each other. The electrode fingers are interdigitated so that their sides face each other.
    [69] In IDTs 1, 2, and 3 of the above-described structure, the signal conversion characteristic and the pass band are determined by the length and width of each electrode finger, the gap of adjacent electrode fingers, and the length of opposite parts of interdigitated electrode fingers (hereinafter Is referred to as "interdigital length"). Other IDTs discussed below have structures and functions that are similar in structure and functions to the IDTs 1, 2 and 3.
    [70] In the SAW apparatus 29 described above, the reflectors 8 and 9 are arranged to sandwich the IDT 7 therebetween to form the SAW resonator 10. The SAW device resonator 10 is connected in series with the IDTs 2 and 3. The balanced signal terminals 11 and 12 are connected to the IDT 1, while the unbalanced signal terminals 13 are connected to the IDT 7.
    [71] The SAW device 29 of the first preferred embodiment is configured such that the electrical neutral point is not located between the balanced signal terminals 11 and 12. More specifically, the pitch between IDTs 1 and 2 and the pitch between IDTs 1 and 3 are, for example, the pitch of eight electrode fingers (eg, 14 in FIG. 2). And portions represented by (15) are preferably smaller than the other electrode fingers of the IDTs. Thus, the continuity of the IDTs 1, 2 and 3 is maintained. To simplify FIG. 2, only a small number of electrode fingers are shown.
    [72] Details of the design values of the extended coupled resonator mode SAW device 29, and more particularly, the values of the SAW component 6 are as follows, for example. The wavelength determined by the small pitch of electrode fingers between IDTs is represented by λ I 2 , and the wavelength determined by the large pitch of other electrode fingers is represented by λ I 1 .
    [73] Interdigital length W: 80.5λI
    [74] Number of IDTs 2: 23 (4)
    [75] Number of IDTs (1): 34 (4)
    [76] Number of IDTs (3): 23 (4)
    [77] (The numbers in parentheses indicate smaller pitch electrode fingers.)
    [78] Wavelength λI 1 of IDTs: 2.1746 μm
    [79] Wavelength λI 2 of IDTs: 1.9609 μm
    [80] Wavelength λ R of reflectors: 2.1826 μm
    [81] Number of reflectors: 150
    [82] Gap between electrode fingers:
    [83] Portion between wavelength λI 1 electrode finger and wavelength λI 2 electrode finger (indicated by (16) in FIG. 2): 0.25λI 1 + 0.25λI 2
    [84] Part between the electrode fingers having a wavelength λI 2 (indicated by in Fig. 2 (17)): 0.50λI 2
    [85] Gap between IDT and reflector: 0.46λR
    [86] IDT Duty:
    [87] Wavelength λI 1 part: 0.63
    [88] Wavelength λI 2 part: 0.60
    [89] Reflector Duty: 0.57
    [90] Electrode Thickness: 0.09λI 1
    [91] The numerical values of the SAW resonator 10 are as follows.
    [92] Interdigital Width (W): 23.7λI
    [93] Number of IDTs: 241
    [94] Wavelength λI of IDTs: 2.1069 μm
    [95] Wavelength of the reflectors λR: λI
    [96] Number of reflectors: 30
    [97] Gap between IDT and reflector: 0.50λR
    [98] IDT Duty: 0.60
    [99] Reflector Duty: 0.60
    [100] Electrode Thickness: 0.09λI
    [101] Referring to FIG. 3, the layout of IDTs 1, 2, 3, and 7, balanced signal terminals 11 and 12, and unbalanced signal terminal 13 in the substrate 30 in the above-described SAW apparatus 29. Explanation is given. In this layout, in addition to the components indicated by the same reference numerals as shown in Figs. 1 and 2, generally square ground electrode pads 24 and 25 are bump bonded of the IDTs 2 and 3; Are formed respectively. The ground electrode pads 24 and 25 are made of a metal that exhibits good conductivity, such as copper or aluminum, to ensure conductivity with the package 31 shown in FIG.
    [102] Bump bonding connections / fixed bumps 39 are formed in the respective ground electrode pads 24 and 25. Similarly, electrode pads and bumps 39 are formed in the respective terminals 11, 12 and 13. In the SAW apparatus 29, the path lines 1a, 1b, 2a, 2b, 3a, 3b and 7a connecting the IDTs 1, 2, 3 and 7 to the terminals 11, 12 and 13 and The electrode pads 24 and 25 are arranged on the substrate so as not to intersect or contact each other.
    [103] The box-shaped package 31 of SAW equipment having the SAW device 29 embedded therein will be described with reference to FIG. 1 below. The package 31 includes a cavity 31a, a bottom portion 32 (device holding substrate), a side portion 33 and a cap 34 (lid) that house the SAW device 29 therein.
    [104] The bottom portion 32 has two layers in the thickness direction: an upper layer 35 facing the cavity 31a and a lower layer 36 facing the outside. External terminals 52, 53, and 54 that establish electrical connection with the external substrate are formed on the bottom surface (facing the exterior) of the lower layer 36 of the bottom portion 32. A die attaching portion 41 which establishes and maintains an electrical connection with the SAW device 29 is formed on the upper surface (facing the cavity 31a) of the upper layer 35. Wiring patterns 43, 44, and 45 for SAW device 29 and die attach portion 41 are electrically and mechanically connected to SAW device 29 through bumps 39.
    [105] With this structure, the SAW device 29 is mounted so that the SAW component 6 faces down on the package 31 such that the SAW component 6 faces the surface of the die attaching portion 41. Since the SAW device 29 is electrically mechanically connected to the die attaching portion 41 via the bumps 39, a gap is formed between the SAW component 6 and the die attaching portion 41. Thus, there is no interference in the operation of the SAW component 6 and the electrical connection between the SAW component 6 and the die attaching portion 41 is maintained.
    [106] 1 and 4, the wiring pattern 42, the balanced signal terminal, which establishes an electrical connection with the unbalanced signal terminal 13 so that the wiring patterns 42, 43, 44, and 45 do not contact each other. The wiring patterns 43 and 44 (electrical circuits) and the ground wiring pattern 45 (electrical circuit) for establishing an electrical connection with the fields 11 and 12 respectively are the surfaces of the die attach portion 41 of the package 31. Is formed.
    [107] Each of the unbalanced signal terminal 13 and the balanced signal terminals 11 and 12 may be defined as either an input terminal or an output terminal. For example, when the unbalanced signal terminal 13 defines the input terminal, the balanced signal terminals 11 and 12 define the output terminals.
    [108] As shown in FIG. 4, on the wiring patterns 42, 43 and 44 and the ground wiring pattern 45, substantially made of a conductive metal exhibiting excellent conductivity and ductility, such as gold represented by the white dots in FIG. Circular bumps 39 are formed, and via-holes 46 and 47, which are represented by black dots in FIG. 4, are formed.
    [109] Via holes 46 and 47 are formed in the thickness direction of the top layer 35 of the electrically insulated bottom portion 32. The conductive metal is then filled in the via holes 46 and 47 to establish an electrical connection between the top and bottom surfaces of the top layer 35.
    [110] Via holes 46 and 47 also establish electrical connection with the top surface of lower layer 36. That is, the via holes 46 and 47 are connected to an electrical circuit (not shown) formed between the upper layer 35 and the lower layer 36.
    [111] FIG. 5 is a plan view showing the bottom layer 36 of the bottom portion 32 shown in FIG. 1 as viewed from above (from the top layer 35). 6 is a plan view of the lower layer 36 as viewed from below. The dashed-dotted line in FIG. 5 indicates the positions of the metal coating patterns (wiring patterns 42, 43, 44, and 45) of the die attaching portion 41 shown in FIG. 4. Metallized patterns are wiring patterns made of a conductive metal film, for example, a nickel / gold-plated tungsten metallized film.
    [112] As shown in FIGS. 4-6, the unbalanced signal wiring patterns 42 and the balanced signal wiring patterns 43 and 44 are taken out of the die attach portion 41 of the upper layer 35 of the bottom portion 32. , Via the veneers 48, 49, and 50, to the external terminals 56, 52, and 53 of the package 31, respectively.
    [113] With this structure, the symmetrical characteristics of the external terminals 52 and 53 with respect to the center of the external terminal 56 and the package 31 are greatly improved over conventional SAW devices, more preferably, the external terminals 52 and 53 are preferably symmetrical with respect to the center of the external terminal 56 and the package 31. Thus, the bridge capacitance generated between the external terminals 52 and 56 is substantially the same as that generated between the external terminals 53 and 56.
    [114] The ground wiring pattern 45 of the die attaching portion 41 is connected to the ground external terminal 55 of the package 31 through the veneer 51, and the ground external terminal of the package 31 through the via hole 46 ( 54, the ground metal cladding pattern 61 (electrical circuit) and the layering 62 of the lower layer 36 of the bottom portion 32.
    [115] The balanced signal terminal 44 is also connected to the metal cladding pattern (electrical circuit) 63 in the lower layer 36 of the bottom portion 32 via the via hole 47. Capacitance is generated between the metal cladding pattern 63 and the ground wiring pattern 45 in the die attaching portion 41 of the upper layer 35 of the bottom portion 32. For example, a capacitor of about 0.4 kW is connected in parallel to the balanced signal wiring pattern 44.
    [116] The operation and advantages of the SAW equipment according to the first preferred embodiment of the present invention will be described below. 7 and 8 are graphs showing each of amplitude balance and phase balance obtained by the SAW equipment of the first preferred embodiment with respect to the frequency change. For comparison, the amplitude balance and phase balance diagrams of SAW equipment including the SAW apparatus 29 of the present preferred embodiment mounted in a conventional package 200 having a single layer bottom portion shown in FIG. 21 are also shown in FIG. 7 and 8. Package 200 shown in FIG. 21 is also formed with balanced signal external terminals 52 and 53 shown in FIG.
    [117] The frequency range in the pass band of the DCS receive filter is set, for example, from 1805 to 1880 MHz. In this range derived from conventional SAW equipment, the maximum difference in amplitude balance is 3.1 dB, while in the first preferred embodiment it is 2.9 dB. Therefore, amplitude balance is improved by about 0.2dB. With respect to phase balance, the maximum difference in the aforementioned frequency range derived from conventional SAW equipment is 27 degrees, whereas in the first preferred embodiment the phase balance is about 19 degrees. Therefore, phase balance is improved by about 8 degrees.
    [118] The reason for the improvement of the balances of the first preferred embodiment is described below. A reactance element is added to the balanced signal outer terminal 53 by forming a metal cladding pattern 63 on the lower layer 36 of the bottom portion 32 of the package 31, so that between the balanced signal outer terminals 52 and 53. Reduce the difference in frequency characteristics. As a result, the balance of the external terminals 52 and 53 is greatly improved.
    [119] That is, the difference in the frequency characteristic between the balanced signal outer terminals 52 and 53 varies depending on the device structure, the layout of the electrodes at the die attach portion 41 or the designated parameters. Thus, the balances are improved by adding a reactance element to the balanced signal external terminal 52.
    [120] 9 is a graph showing insertion loss frequency characteristics of the SAW equipment of the first preferred embodiment. For comparison, the insertion loss of SAW equipment including the SAW device 29 mounted in the conventional package 200 with the single layer bottom portion shown in FIG. 21 is also shown in FIG. In the first preferred embodiment, the attenuation in the frequency range larger than the pass band, in particular 2500-4000 MHz, is improved by up to about 20 dB over conventional SAW equipment.
    [121] The reason for the improvement in this attenuation is described below. Via holes 46 and 47 are formed in the upper layer 35 of the bottom portion 32 of the package 31. Then, the ground wiring pattern 45 of the die attaching portion 41 is connected to the ground external terminal 54 of the package 31 through the metal coating pattern 63 at the lower layer 36. Thus, the connecting portions between the ground wiring pattern 45 and the ground external terminal 54 are increased to enhance the ground strength, thereby improving the attenuation.
    [122] According to the structure of the first preferred embodiment, the electrical neutral point between the balanced signal terminals is prevented. In general, in SAW equipment provided with a balun function, symmetrically placing balanced signal terminals in SAW equipment without electrical neutrality is more difficult than symmetrically placing balanced signal terminals in SAW equipment with electrical neutrality due to the layout. Therefore, the present invention is more effective when used in SAW equipment without electrical neutrality. However, even in SAW equipment with an electrical neutral point, the balance is reduced due to the difference between the polarities of adjacent electrode fingers of different IDTs. Therefore, advantages similar to those provided by SAW equipment without electrical neutrality appear for SAW equipment with electrical neutrality.
    [123] As an example of a modification made in the first preferred embodiment, SAW equipment having an electrical neutral point is shown in FIG. 10. In the SAW equipment shown in FIG. 10, four extended coupled resonator mode SAW devices 71-74 (the center IDTs of the SAW devices 73 and 74 are reversed) are used to form the balun function. The balanced signal is output (or input) from (or to) signal terminals 75 and 76.
    [124] As another example of a modification made to the first preferred embodiment, SAW equipment having an electrical neutral point is shown in FIG. 11. In such SAW equipment, the bottom portion 32 of the package 31 is multi-layered, and a metal coating pattern is formed between the layers. Then, a reactance element is added to one of the balanced signal terminals. With this structure, the balances are greatly improved. In addition, the connecting portions between the die attach portion and the ground external terminal are increased to strengthen the grounding force, thereby improving attenuation. In the SAW equipment shown in FIG. 11, the two extended coupled resonator mode SAW devices 81 and 82 are cascaded, and the IDT 83 of the SAW device 82 is divided into two parts, forming a balun function. do. The balanced signal is output (or input) from (or to) balanced signal terminals 84 and 85.
    [125] Another example of a modification made in the first preferred embodiment is shown in FIG. 12. In the present SAW equipment, the balanced signal terminals 21 serve as both an input signal terminal and an output signal terminal. By applying the present invention to such SAW equipment, the balances and attenuation are also improved.
    [126] In the first preferred embodiment, the bottom portion 32 of the package 31 may be defined by three or more layers, although it is limited to two layers. In the present case, similarly, an adjusting portion including at least one of a reactance element, a delay line, and a resistance element is inserted between the balanced signal terminals, and the ground force is between the die attach portion 41 and the ground external terminal 54. It is strengthened by increasing the connecting parts. As a result, advantages similar to those achieved by the first preferred embodiment are obtained.
    [127] In a first preferred embodiment, the balanced signal is output (or input) from (or to) the extended coupled resonator mode SAW apparatus 29. However, a transverse resonator mode SAW device or transverse coupling filter is used to output (or input) a balanced signal. In this case, advantages similar to those achieved by the first preferred embodiment are obtained.
    [128] SAW equipment according to a second preferred embodiment of the present invention is described below with reference to FIGS. 13 and 14. The second preferred embodiment differs from the first preferred embodiment in the number of via holes formed in the top layer 35 of the bottom portion 32 and in the structure of the metallization patterns in the bottom layer 36 of the bottom portion 32. In a second preferred embodiment, the SAW device 29 used in the first preferred embodiment is stored in a downward facing package 91.
    [129] The details of the design of the SAW device 29, the overall structure of the package 91 and the arrangement of the external terminals are similar to those of the first preferred embodiment and description thereof is omitted. FIG. 13 is a plan view showing the surface of the die attaching portion 92b formed on the upper layer 92a of the bottom portion 92. FIG. 14 is a plan view illustrating the lower layer 93 of the bottom portion 92 as viewed from above.
    [130] The dashed dashed lines shown in FIG. 14 represent portions of the metallized wiring patterns 94, 95, 96, and 97 (electrical circuits) of the die attaching portion 92b shown in FIG. In the die attach portion 92b shown in FIG. 13, the white dots indicate the positions of the bumps, while the black dots specify the positions of the via holes 97a, 98 and 99. Wiring pattern 94 electrically connected to the unbalanced signal terminal 13, wiring pattern 95 electrically connected to the balanced signal terminal 11, and wiring pattern 96 electrically connected to the balanced signal terminal 12. And ground wiring pattern 97 is also formed in die attach portion 92b.
    [131] The wiring patterns 95 and 96 are connected to the metal coating patterns (electric circuit) 93a and 93b in the lower layer 93 through the via holes (electric circuit) 98 and 99, respectively. The ground wiring pattern 97 is connected to the ground external terminal 55 through the layering 51, and also in the via hole 97a, the metal coating pattern (electrical circuit 93c) and the lower layer 93 of the bottom portion 92. It is connected to the grounded external terminal 54 of the package 91 via the layering 62.
    [132] The metal cladding pattern 93a defines a reactance element, for example, a reactance element (inductance element) having a value of about 0.4 nH is inserted in series with the balanced signal terminal 11. Capacitance is generated between the metal cladding pattern 93b and the ground wiring pattern 97 in the die attach portion 92b of the top layer of the bottom portion 32, for example, a reactance element (capacitance having a value of about 0.4 pF). Element) is inserted in parallel to the balanced signal terminal 12. That is, the reactance element is added in series to the balanced signal terminal 11, and the other reactance element is added in parallel to the balanced signal terminal 12.
    [133] In the above-described SAW equipment, the layout of the external terminals 52, 53, 54, 55 and 56 of the package 91 is similar to the layout shown in FIG. 6. The wiring patterns 94, 95, and 96 shown in FIG. 13 are connected to the external terminals 56, 52, and 53, respectively.
    [134] The operation and advantages of the SAW equipment of the second preferred embodiment are described below. 15 and 16 are graphs illustrating respective amplitude balance and phase balance obtained by the SAW equipment of the second preferred embodiment with respect to the change in frequency. For comparison, amplitude and phase balance diagrams derived from SAW equipment including SAW device 29 mounted in a conventional package 200 with a single-layer bottom portion shown in FIG. 21 are shown in FIGS. 15 and 16. Also shown in
    [135] The frequency range of the pass band of the DSC receive filter is preferably about 1805 to 1880 MHz. The maximum difference in amplitude balance in this range of conventional SAW equipment is 3.2 dB, while that of the second preferred embodiment is about 2.9 dB, therefore the amplitude balance is improved by about 0.3 dB. With respect to phase balance, the maximum frequency difference in the above-described frequency range derived with conventional SAW equipment is 27 degrees, while that of the second preferred embodiment is about 16 degrees. Therefore, phase balance is improved by about 11 degrees.
    [136] This is because the difference in frequency characteristic between the external terminals 52 and 53 stems to improve the balance between them. That is, the bottom portion 92 is limited to two layers, and electrical wiring patterns are inserted between the two layers. More specifically, the metal cladding pattern 93a, which is a strip line operating as a reactance element, is formed for the balanced signal terminal 11, while the metal cladding pattern 93b in the lower layer 93 of the bottom portion 92 is formed. And an overlapping portion between the ground wiring patterns 97 of the die attaching portion 92b of the upper layer is formed for the balanced signal terminal 12. With this arrangement, other reactance elements are added to the corresponding balanced signal terminals 11 and 12, correcting for the difference in frequency characteristics between the external terminals 52 and 53, thereby greatly improving the balance between them. .
    [137] As described above, according to the second preferred embodiment, in the SAW equipment provided with the balun function, the metal cladding pattern 93a defining the strip line is connected to the balanced signal terminal 11, whereas in the lower layer 93 The overlapping portion between the metal cladding pattern 93b and the ground wiring pattern 97 in the upper layer is formed for the other balanced signal terminals 12 so that other reactance elements are added to the corresponding balanced signal terminals 11 and 12. With this arrangement, SAW equipment is obtained with a significantly improved balance over conventional SAW equipment.
    [138] In the first and second preferred embodiments, since the electrical circuits are provided between the two layers of the bottom portion 32, the area in which the bonding bumps 39 are formed is not limited, thereby the package 31 or 91. Strengthen the grip of the.
    [139] In addition, in the first and second preferred embodiments, reactance elements are added through metallized patterns formed on the top surface of the bottom layer 36 of the bottom portion 32. Optionally, delay lines or resistance elements can be formed in the bottom layer 36 of the bottom portion 32, in which case advantages similar to those produced by the first and second preferred embodiments are obtained.
    [140] With reference to FIG. 17, a description is given of communication equipment comprising at least one of the SAW equipments of the first and second preferred embodiments according to the third preferred embodiment of the present invention. In communication equipment 600, as shown in FIG. 17, receiver Rx includes antenna 601, antenna sharing portion / RF upper filter 602, amplifier 603, Rx subfilter 604, mixer 605. ), First IF filter 606, mixer 607, second IF filter 608, first-and-second-signal local synthesizer 611, temperature compensation determination Oscillator (TCXO) 612, divider 613 and local filter 614.
    [141] As represented by the two lines between the Rx filter 604 and the mixer 605 of FIG. 17, it is desirable that the two balanced signals are transmitted from the Rx filter 604 to the mixer 605 to maintain the balance characteristics. .
    [142] In communications equipment 600, transmitter Tx includes antenna 601, antenna sharing portion / RF upper filter 602, Tx IF filter 621, mixer 622, Tx subfilter 623, amplifier 624. ), A coupler 625, an insulator 626, and an automatic power control device (APC device) 627. Antenna 601 and antenna sharing portion / RF upper filter 602 are divided by receiver Rx and transmitter Tx.
    [143] The SAW equipment of the first or second preferred embodiment is used as the Rx filter 604, the first IF filter 606, the Tx IF filter 621, and the Tx filter 623.
    [144] The SAW equipment of various preferred embodiments of the present invention provides not only a filtering function, but also a balun function, and exhibits an excellent characteristic of greatly improving amplitude balance and phase balance between balanced signals. Therefore, according to the communication equipment of the present invention in which the composite SAW equipment is provided, a large number of parts are reduced, and thus, the overall size of the communication equipment is greatly reduced. Transmission characteristics are also greatly improved.
    [145] While the preferred embodiments of the invention are described above, variations and changes are understood by those skilled in the art within the scope and spirit of the invention. Therefore, the scope of the present invention should only be determined by the following claims.
    权利要求:
    Claims (20)
    [1" claim-type="Currently amended] A surface acoustic wave device formed on a piezoelectric substrate and including at least one interdigital electrode and balanced signal terminals formed at least on the input side and the output side;
    A multilayer holding substrate including external terminals for connecting the balanced signal terminals to an external device, the multilayer holding substrate being formed to hold the surface acoustic wave filter device so that the at least one interdigital electrode faces its surface; And
    An electrical circuit formed between the layers of the multilayer holding substrate and positioned between the balanced signal terminals and the external terminals to increase the balance between the balanced signal terminals; Surface acoustic wave equipment comprising a.
    [2" claim-type="Currently amended] The surface acoustic wave as claimed in claim 1, further comprising a package for receiving the surface acoustic wave device, wherein the external terminals are disposed substantially symmetrically with respect to a central portion of the package through the electrical circuit. equipment.
    [3" claim-type="Currently amended] 2. The surface acoustic wave device as claimed in claim 1, wherein the electric circuit includes an adjusting portion formed for at least one of the balanced signal terminals of the surface acoustic wave device in order to improve the signal propagation characteristics of the balanced signal terminal. .
    [4" claim-type="Currently amended] 4. The surface acoustic wave device as claimed in claim 3, wherein the adjusting portion is defined by at least one of a delay line, a reactance element, and a resistance element.
    [5" claim-type="Currently amended] 4. The surface acoustic wave device as claimed in claim 3, wherein the electric circuit includes adjusting portions for both balanced signal terminals of the surface acoustic wave device.
    [6" claim-type="Currently amended] 6. The surface acoustic wave device as claimed in claim 5, wherein the degree of adjustment of one of the adjustment parts for one of the balanced signal terminals is different from the degree of adjustment of the other adjustment part for another balanced signal terminal.
    [7" claim-type="Currently amended] The surface acoustic wave device as claimed in claim 1, wherein the surface acoustic wave device comprises a longitudinally coupled resonator mode surface acoustic wave component having at least three interdigital electrodes.
    [8" claim-type="Currently amended] The surface acoustic wave device as claimed in claim 1, wherein the surface acoustic wave device is assembled so that an electric neutral point is not formed between the balanced signal terminals.
    [9" claim-type="Currently amended] A communication device comprising at least one surface acoustic wave device referred to in claim 1.
    [10" claim-type="Currently amended] The surface acoustic wave equipment as claimed in claim 1, wherein a die attaching portion is formed on an upper surface of an upper layer of the multilayer holding substrate to electrically connect the surface acoustic wave device to the electrical circuit.
    [11" claim-type="Currently amended] 11. The surface acoustic wave device as claimed in claim 10, wherein the surface acoustic wave device is electrically and mechanically connected to the die attaching portion through bumps.
    [12" claim-type="Currently amended] The surface acoustic wave device as claimed in claim 10, wherein the die attach portion is electrically and mechanically connected to the electrical circuit by via holes formed in an upper layer of the multilayer holding substrate.
    [13" claim-type="Currently amended] 8. The surface acoustic wave device of claim 7, wherein the longitudinally coupled resonator mode surface acoustic wave component further comprises at least two reflectors sandwiching at least three interdigital electrodes.
    [14" claim-type="Currently amended] The surface acoustic wave device as claimed in claim 1, wherein the external terminals are formed on a bottom surface of a bottom layer of the multilayer holding substrate.
    [15" claim-type="Currently amended] A surface acoustic wave device formed on a piezoelectric substrate, the surface acoustic wave device including at least one interdigital electrode and two balanced signal terminals and one unbalanced signal terminal;
    A multi-layer holding defined by at least an upper layer and a lower layer, comprising external terminals connecting the two balanced signal terminals and one unbalanced signal terminal to an external device, the surface being arranged to face the at least one interdigital electrode; Board; And
    Formed between the top and bottom layers of the multilayer sustaining substrate so as to be positioned between the two balanced signal terminals and the external terminals and between the unbalanced signal terminal and the external electrodes. A plurality of wiring patterns to increase; Surface acoustic wave equipment comprising a.
    [16" claim-type="Currently amended] The surface acoustic wave device according to claim 15, further comprising a package containing the surface acoustic wave device, wherein the external terminals are substantially symmetrical with respect to a central portion of the package through the plurality of wiring patterns.
    [17" claim-type="Currently amended] 16. The elasticity of claim 15, wherein the plurality of wiring patterns include an adjustment portion formed for at least one of the balanced signal terminals of the surface acoustic wave device to improve signal propagation characteristics of the balanced signal terminal. Surface wave equipment.
    [18" claim-type="Currently amended] 18. The surface acoustic wave device as claimed in claim 17, wherein the adjusting portion is defined by at least one of a delay line, a reactance element, and a resistance element.
    [19" claim-type="Currently amended] 18. The surface acoustic wave device as claimed in claim 17, wherein the plurality of wiring patterns comprise adjusting portions for both balanced signal terminals of the surface acoustic wave device.
    [20" claim-type="Currently amended] 20. The surface acoustic wave device as claimed in claim 19, wherein the degree of adjustment of one of the adjustment parts for one of the balanced signal terminals is different from the degree of adjustment of the other adjustment part for another balanced signal terminal.
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    同族专利:
    公开号 | 公开日
    JP3414387B2|2003-06-09|
    JP2002271168A|2002-09-20|
    US20020135268A1|2002-09-26|
    EP1239589B1|2009-02-11|
    CN1376005A|2002-10-23|
    CN1232148C|2005-12-14|
    DE60231091D1|2009-03-26|
    KR100511221B1|2005-08-31|
    EP1239589A1|2002-09-11|
    US6771003B2|2004-08-03|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2001-03-09|Priority to JP2001067676A
    2001-03-09|Priority to JPJP-P-2001-00067676
    2002-03-08|Application filed by 가부시키가이샤 무라타 세이사쿠쇼
    2002-09-14|Publication of KR20020072230A
    2005-08-31|Application granted
    2005-08-31|Publication of KR100511221B1
    优先权:
    申请号 | 申请日 | 专利标题
    JP2001067676A|JP3414387B2|2001-03-09|2001-03-09|Surface acoustic wave device, communication device|
    JPJP-P-2001-00067676|2001-03-09|
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